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OSK02MA103 Specialized one-side scrub cleaning device

Specialized one-side scrub cleaning device
Application
      Manual loading / unloading cleaning testing device
Features
    1. Maximal φ8"can clean one-sided scrub
    2. Most basic type of 1 pot type
    3. Scrab +Spin stage structure
    4. Multi-recipe settings are possible by multi-function display
    5. Meaga-sonic unit (Option)is possible for demonstration test
Effect
      3 types 5 steps recipe settings are appliable according to tests
Specification
     
    Model OSK02MA103
    Applied Wf Size φ3″- φ8"
    No. of channels 1 channel
    Chamber structure One-side scrab, spin
    LD-UnLD Manual
    Foot print W1000 x D700 x H1300mm
    Application CMP/ MEMS/ CMP parts evaluation
OSK02MA103 Specialized one-side scrub cleaning device

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